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Abstract In view of the shortcomings of silicon micro acceleration sensor based on piezoresistive effect and capacitance principle,
such as temperature drift, low resolution and poor anti-interference ability, a fuze acceleration sensor based on dual SAW devices is
proposed. The sensor adopts a dual saw device structure, one is coated with a sensitive film for measurement, the other is an uncoat-
ed reference channel for compensation of environmental temperature, pressure, humidity and other factors. The experimental results
show that the maximum linear error is only 1.6%, the sensitivity is 54.3Hz/g, and the maximum hysteresis error is less than 1%.
Compared with piezoresistive accelerometer and capacitive accelerometer, the linear error of the accelerometer is small, the sensitivi-
ty is high, and it has strong anti-interference ability.
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