基于双声表面波器件的引信加速度传感器

赵永昌 孙国先

电脑与电信 ›› 2020, Vol. 1 ›› Issue (7) : 70-73.

电脑与电信 ›› 2020, Vol. 1 ›› Issue (7) : 70-73.
应用技术与研究

基于双声表面波器件的引信加速度传感器

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FuzeAcceleration Sensor Based on Double SAW Sevices

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Abstract

In view of the shortcomings of silicon micro acceleration sensor based on piezoresistive effect and capacitance principle, such as temperature drift, low resolution and poor anti-interference ability, a fuze acceleration sensor based on dual SAW devices is proposed. The sensor adopts a dual saw device structure, one is coated with a sensitive film for measurement, the other is an uncoat- ed reference channel for compensation of environmental temperature, pressure, humidity and other factors. The experimental results show that the maximum linear error is only 1.6%, the sensitivity is 54.3Hz/g, and the maximum hysteresis error is less than 1%. Compared with piezoresistive accelerometer and capacitive accelerometer, the linear error of the accelerometer is small, the sensitivi- ty is high, and it has strong anti-interference ability.

Key words

fuze / acceleration sensor / dual saw device

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赵永昌 孙国先. 基于双声表面波器件的引信加速度传感器[J]. 电脑与电信. 2020, 1(7): 70-73
ZHAO Yong-chang SUN Guo-xian. FuzeAcceleration Sensor Based on Double SAW Sevices[J]. Computer & Telecommunication. 2020, 1(7): 70-73

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